JPH0414933Y2 - - Google Patents

Info

Publication number
JPH0414933Y2
JPH0414933Y2 JP19544787U JP19544787U JPH0414933Y2 JP H0414933 Y2 JPH0414933 Y2 JP H0414933Y2 JP 19544787 U JP19544787 U JP 19544787U JP 19544787 U JP19544787 U JP 19544787U JP H0414933 Y2 JPH0414933 Y2 JP H0414933Y2
Authority
JP
Japan
Prior art keywords
wafer
needle
support frame
contact
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19544787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0197551U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19544787U priority Critical patent/JPH0414933Y2/ja
Publication of JPH0197551U publication Critical patent/JPH0197551U/ja
Application granted granted Critical
Publication of JPH0414933Y2 publication Critical patent/JPH0414933Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19544787U 1987-12-22 1987-12-22 Expired JPH0414933Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19544787U JPH0414933Y2 (en]) 1987-12-22 1987-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19544787U JPH0414933Y2 (en]) 1987-12-22 1987-12-22

Publications (2)

Publication Number Publication Date
JPH0197551U JPH0197551U (en]) 1989-06-29
JPH0414933Y2 true JPH0414933Y2 (en]) 1992-04-03

Family

ID=31486125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19544787U Expired JPH0414933Y2 (en]) 1987-12-22 1987-12-22

Country Status (1)

Country Link
JP (1) JPH0414933Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012141197A (ja) * 2010-12-28 2012-07-26 Advantest Corp 試験装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5489356B2 (ja) * 2010-10-20 2014-05-14 株式会社日本マイクロニクス 半導体測定装置
JP5599341B2 (ja) * 2011-02-21 2014-10-01 株式会社シバソク 試験装置
JP5562320B2 (ja) * 2011-12-08 2014-07-30 三菱電機株式会社 半導体試験装置および半導体試験方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012141197A (ja) * 2010-12-28 2012-07-26 Advantest Corp 試験装置

Also Published As

Publication number Publication date
JPH0197551U (en]) 1989-06-29

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